The original paper is in English. Non-English content has been machine-translated and may contain typographical errors or mistranslations. ex. Some numerals are expressed as "XNUMX".
Copyrights notice
The original paper is in English. Non-English content has been machine-translated and may contain typographical errors or mistranslations. Copyrights notice
Foram desenvolvidos scanners ópticos ressonantes bidimensionais acionados por pentes eletrostáticos verticais com uma estrutura de isolamento elétrico exclusiva. O isolamento na estrutura móvel ao redor do espelho gimbal de 1 mm de diâmetro é feito abrindo valas na camada superior de silício de um wafer SOI, deixando as espessas camadas inferiores. Graças à grande massa do quadro, as frequências de ressonância variam de 65.0 a 89.2 Hz para o quadro e de 11.9 a 36.8 kHz para o espelho em um formato de 4 mm.
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Hiroshi NOGE, Yosuke HAGIHARA, Kiyohiko KAWANO, Hideki UEDA, Takaaki YOSHIHARA, "Electrostatically Actuated Two-Dimensional Optical Scanner Having a High Resonant Frequency Ratio of Fast/Slow Axes" in IEICE TRANSACTIONS on Electronics,
vol. E91-C, no. 10, pp. 1611-1615, October 2008, doi: 10.1093/ietele/e91-c.10.1611.
Abstract: Two-dimensional resonant optical scanners actuated by vertical electrostatic combs with a unique electrical isolation structure have been developed. The isolation on the movable frame surrounding 1 mm-diameter gimbal mirror is made by trenching the top silicon layer of an SOI wafer with leaving the thick bottom layers. Thanks to the large mass of the frame, the resonant frequencies range in 65.0-89.2 Hz for the frame and in 11.9-36.8 kHz for the mirror in a 4 mm
URL: https://global.ieice.org/en_transactions/electronics/10.1093/ietele/e91-c.10.1611/_p
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@ARTICLE{e91-c_10_1611,
author={Hiroshi NOGE, Yosuke HAGIHARA, Kiyohiko KAWANO, Hideki UEDA, Takaaki YOSHIHARA, },
journal={IEICE TRANSACTIONS on Electronics},
title={Electrostatically Actuated Two-Dimensional Optical Scanner Having a High Resonant Frequency Ratio of Fast/Slow Axes},
year={2008},
volume={E91-C},
number={10},
pages={1611-1615},
abstract={Two-dimensional resonant optical scanners actuated by vertical electrostatic combs with a unique electrical isolation structure have been developed. The isolation on the movable frame surrounding 1 mm-diameter gimbal mirror is made by trenching the top silicon layer of an SOI wafer with leaving the thick bottom layers. Thanks to the large mass of the frame, the resonant frequencies range in 65.0-89.2 Hz for the frame and in 11.9-36.8 kHz for the mirror in a 4 mm
keywords={},
doi={10.1093/ietele/e91-c.10.1611},
ISSN={1745-1353},
month={October},}
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TY - JOUR
TI - Electrostatically Actuated Two-Dimensional Optical Scanner Having a High Resonant Frequency Ratio of Fast/Slow Axes
T2 - IEICE TRANSACTIONS on Electronics
SP - 1611
EP - 1615
AU - Hiroshi NOGE
AU - Yosuke HAGIHARA
AU - Kiyohiko KAWANO
AU - Hideki UEDA
AU - Takaaki YOSHIHARA
PY - 2008
DO - 10.1093/ietele/e91-c.10.1611
JO - IEICE TRANSACTIONS on Electronics
SN - 1745-1353
VL - E91-C
IS - 10
JA - IEICE TRANSACTIONS on Electronics
Y1 - October 2008
AB - Two-dimensional resonant optical scanners actuated by vertical electrostatic combs with a unique electrical isolation structure have been developed. The isolation on the movable frame surrounding 1 mm-diameter gimbal mirror is made by trenching the top silicon layer of an SOI wafer with leaving the thick bottom layers. Thanks to the large mass of the frame, the resonant frequencies range in 65.0-89.2 Hz for the frame and in 11.9-36.8 kHz for the mirror in a 4 mm
ER -