The original paper is in English. Non-English content has been machine-translated and may contain typographical errors or mistranslations. ex. Some numerals are expressed as "XNUMX".
Copyrights notice
The original paper is in English. Non-English content has been machine-translated and may contain typographical errors or mistranslations. Copyrights notice
Um dispositivo de revestimento por pulverização catódica indiretamente reativo foi desenvolvido para depositar vários filmes metálicos e de óxido metálico de alta qualidade com alta taxa de deposição. Nesta carta, vários tipos de filtros, como revestimento anti-reflexo (AR), filtro de corte IR e filtro Rugate, foram depositados para o teste de referência de capacidades implementadas. Nosso revestidor foi estabelecido para ser uma ferramenta poderosa para filtros multicamadas discretos e Rugate devido à alta estabilidade e reprodutibilidade do índice de refração e da taxa de deposição.
The copyright of the original papers published on this site belongs to IEICE. Unauthorized use of the original or translated papers is prohibited. See IEICE Provisions on Copyright for details.
Copiar
Kei-ichi C. NAMIKI, Xinbin CHENG, Haruo TAKAHASHI, "Indirectly Reactive Sputtering Coater for High Quality Optical Coatings" in IEICE TRANSACTIONS on Electronics,
vol. E91-C, no. 10, pp. 1673-1674, October 2008, doi: 10.1093/ietele/e91-c.10.1673.
Abstract: An indirectly reactive sputtering coater has been developed to deposit various high quality metallic and metal oxide films at high deposition rate. In this letter, several kinds of filters such as antireflection (AR) coating, IR-cut filter, and Rugate filter were deposited for the benchmark test of implemental capabilities. Our coater was established to be a powerful tool for both discrete multilayer and Rugate filters due to high stability and reproducibility of the refractive index and the deposition rate.
URL: https://global.ieice.org/en_transactions/electronics/10.1093/ietele/e91-c.10.1673/_p
Copiar
@ARTICLE{e91-c_10_1673,
author={Kei-ichi C. NAMIKI, Xinbin CHENG, Haruo TAKAHASHI, },
journal={IEICE TRANSACTIONS on Electronics},
title={Indirectly Reactive Sputtering Coater for High Quality Optical Coatings},
year={2008},
volume={E91-C},
number={10},
pages={1673-1674},
abstract={An indirectly reactive sputtering coater has been developed to deposit various high quality metallic and metal oxide films at high deposition rate. In this letter, several kinds of filters such as antireflection (AR) coating, IR-cut filter, and Rugate filter were deposited for the benchmark test of implemental capabilities. Our coater was established to be a powerful tool for both discrete multilayer and Rugate filters due to high stability and reproducibility of the refractive index and the deposition rate.},
keywords={},
doi={10.1093/ietele/e91-c.10.1673},
ISSN={1745-1353},
month={October},}
Copiar
TY - JOUR
TI - Indirectly Reactive Sputtering Coater for High Quality Optical Coatings
T2 - IEICE TRANSACTIONS on Electronics
SP - 1673
EP - 1674
AU - Kei-ichi C. NAMIKI
AU - Xinbin CHENG
AU - Haruo TAKAHASHI
PY - 2008
DO - 10.1093/ietele/e91-c.10.1673
JO - IEICE TRANSACTIONS on Electronics
SN - 1745-1353
VL - E91-C
IS - 10
JA - IEICE TRANSACTIONS on Electronics
Y1 - October 2008
AB - An indirectly reactive sputtering coater has been developed to deposit various high quality metallic and metal oxide films at high deposition rate. In this letter, several kinds of filters such as antireflection (AR) coating, IR-cut filter, and Rugate filter were deposited for the benchmark test of implemental capabilities. Our coater was established to be a powerful tool for both discrete multilayer and Rugate filters due to high stability and reproducibility of the refractive index and the deposition rate.
ER -