The original paper is in English. Non-English content has been machine-translated and may contain typographical errors or mistranslations. ex. Some numerals are expressed as "XNUMX".
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The original paper is in English. Non-English content has been machine-translated and may contain typographical errors or mistranslations. Copyrights notice
Propomos uma estrutura tridimensional sobre um substrato plano empregando tecnologia de microusinagem. Uma estrutura suspensa de baixa perda incorporando uma membrana BCB empregando tecnologia de gravação em valas profundas foi recentemente proposta. Uma estrutura de linha suspensa microusinada usando filme de membrana BCB nos permite realizar um ressonador planar de baixa perda, que alcançou um fator de qualidade sem carga (fator Q) de mais de 280 a 60 GHz. Projetamos filtros e antenas de baixa perda embutidos em silício na banda de 60 GHz. Um filtro de baixa perda obtém uma perda de inserção de 1.0 dB a 60 GHz e uma antena patch obtém uma largura de banda de 3%. Além disso, demonstramos um IC front-end do receptor de 60 GHz incorporando o filtro planar e a antena e obtemos bons resultados. Essas técnicas nos permitem integrar diversas funções em um pacote compacto, mesmo em bandas de ondas milimétricas.
Kazuaki TAKAHASHI
Ushio SANGAWA
Suguru FUJITA
Michiaki MATSUO
Takeharu URABE
Hiroshi OGURA
Hiroyuki YABUKI
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Kazuaki TAKAHASHI, Ushio SANGAWA, Suguru FUJITA, Michiaki MATSUO, Takeharu URABE, Hiroshi OGURA, Hiroyuki YABUKI, "A Compact V-Band Filter/Antenna Integrated Receiver IC Built on Si-Micromachined BCB Suspended Structure" in IEICE TRANSACTIONS on Electronics,
vol. E84-C, no. 10, pp. 1506-1514, October 2001, doi: .
Abstract: We propose a three-dimensional structure on a planar substrate employing micromachining technology. A low-loss suspended structure incorporating a BCB membrane employing deep trench etching technology has been newly proposed. A micromachined suspended line structure using BCB membrane film enables us to realize a low loss planar resonator, which achieved an unloaded quality factor (Q-factor) of more than 280 at 60 GHz. We design low-loss filters and antennas built into silicon in a 60 GHz band. A low-loss filter realizes an insertion loss of 1.0 dB at 60 GHz and a patch antenna obtains a 3% bandwidth. In addition, we demonstrate a 60 GHz receiver front-end IC incorporating the planar filter and the antenna, and obtain good results. These techniques enable us to integrate various functions into a compact package even in millimeter-wave bands.
URL: https://global.ieice.org/en_transactions/electronics/10.1587/e84-c_10_1506/_p
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@ARTICLE{e84-c_10_1506,
author={Kazuaki TAKAHASHI, Ushio SANGAWA, Suguru FUJITA, Michiaki MATSUO, Takeharu URABE, Hiroshi OGURA, Hiroyuki YABUKI, },
journal={IEICE TRANSACTIONS on Electronics},
title={A Compact V-Band Filter/Antenna Integrated Receiver IC Built on Si-Micromachined BCB Suspended Structure},
year={2001},
volume={E84-C},
number={10},
pages={1506-1514},
abstract={We propose a three-dimensional structure on a planar substrate employing micromachining technology. A low-loss suspended structure incorporating a BCB membrane employing deep trench etching technology has been newly proposed. A micromachined suspended line structure using BCB membrane film enables us to realize a low loss planar resonator, which achieved an unloaded quality factor (Q-factor) of more than 280 at 60 GHz. We design low-loss filters and antennas built into silicon in a 60 GHz band. A low-loss filter realizes an insertion loss of 1.0 dB at 60 GHz and a patch antenna obtains a 3% bandwidth. In addition, we demonstrate a 60 GHz receiver front-end IC incorporating the planar filter and the antenna, and obtain good results. These techniques enable us to integrate various functions into a compact package even in millimeter-wave bands.},
keywords={},
doi={},
ISSN={},
month={October},}
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TY - JOUR
TI - A Compact V-Band Filter/Antenna Integrated Receiver IC Built on Si-Micromachined BCB Suspended Structure
T2 - IEICE TRANSACTIONS on Electronics
SP - 1506
EP - 1514
AU - Kazuaki TAKAHASHI
AU - Ushio SANGAWA
AU - Suguru FUJITA
AU - Michiaki MATSUO
AU - Takeharu URABE
AU - Hiroshi OGURA
AU - Hiroyuki YABUKI
PY - 2001
DO -
JO - IEICE TRANSACTIONS on Electronics
SN -
VL - E84-C
IS - 10
JA - IEICE TRANSACTIONS on Electronics
Y1 - October 2001
AB - We propose a three-dimensional structure on a planar substrate employing micromachining technology. A low-loss suspended structure incorporating a BCB membrane employing deep trench etching technology has been newly proposed. A micromachined suspended line structure using BCB membrane film enables us to realize a low loss planar resonator, which achieved an unloaded quality factor (Q-factor) of more than 280 at 60 GHz. We design low-loss filters and antennas built into silicon in a 60 GHz band. A low-loss filter realizes an insertion loss of 1.0 dB at 60 GHz and a patch antenna obtains a 3% bandwidth. In addition, we demonstrate a 60 GHz receiver front-end IC incorporating the planar filter and the antenna, and obtain good results. These techniques enable us to integrate various functions into a compact package even in millimeter-wave bands.
ER -