The original paper is in English. Non-English content has been machine-translated and may contain typographical errors or mistranslations. ex. Some numerals are expressed as "XNUMX".
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The original paper is in English. Non-English content has been machine-translated and may contain typographical errors or mistranslations. Copyrights notice
Estruturas finamente texturizadas em uma superfície de silício foram fabricadas para atuar como emissores de campo através de um simples jato de areia usando Al fino2O3 partículas. Os testes confirmaram que as estruturas finamente cortadas funcionam bem como emissores de campo eficientes. A corrente de emissão obedece à relação de Fowler-Nordheim, com baixo limiar de campo elétrico. A flutuação da corrente de emissão foi inversamente proporcional à raiz quadrada da corrente de emissão média, e o desvio de longo prazo da corrente de emissão foi de cerca de 1% por hora na corrente de emissão média de 108 µA na faixa de pressão de 10-5Pa, indicando que o emissor oferece uma saída de corrente estável.
Tomomi YOSHIMOTO
Toyo University
Tatsuo IWATA
Mie University
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Tomomi YOSHIMOTO, Tatsuo IWATA, "Field-Emission from Finely Nicked Structures on n-Type Silicon Substrate Formed by Sandblasting Process" in IEICE TRANSACTIONS on Electronics,
vol. E102-C, no. 2, pp. 207-210, February 2019, doi: 10.1587/transele.2018ECS6016.
Abstract: Finely textured structures on a silicon surface were fabricated to act as field emitters via simple sandblasting using fine Al2O3 particles. Tests confirmed that the finely nicked structures function well as efficient field emitters. The emission current obeys the Fowler-Nordheim relationship, with a low electric field threshold. The fluctuation of the emission current was inversely proportional to the square root of the average emission current, and the long-term drift of the emission current was about 1% per hour at the average emission current of 108µA in the pressure range of 10-5Pa, indicating that the emitter offers a stable current output.
URL: https://global.ieice.org/en_transactions/electronics/10.1587/transele.2018ECS6016/_p
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@ARTICLE{e102-c_2_207,
author={Tomomi YOSHIMOTO, Tatsuo IWATA, },
journal={IEICE TRANSACTIONS on Electronics},
title={Field-Emission from Finely Nicked Structures on n-Type Silicon Substrate Formed by Sandblasting Process},
year={2019},
volume={E102-C},
number={2},
pages={207-210},
abstract={Finely textured structures on a silicon surface were fabricated to act as field emitters via simple sandblasting using fine Al2O3 particles. Tests confirmed that the finely nicked structures function well as efficient field emitters. The emission current obeys the Fowler-Nordheim relationship, with a low electric field threshold. The fluctuation of the emission current was inversely proportional to the square root of the average emission current, and the long-term drift of the emission current was about 1% per hour at the average emission current of 108µA in the pressure range of 10-5Pa, indicating that the emitter offers a stable current output.},
keywords={},
doi={10.1587/transele.2018ECS6016},
ISSN={1745-1353},
month={February},}
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TY - JOUR
TI - Field-Emission from Finely Nicked Structures on n-Type Silicon Substrate Formed by Sandblasting Process
T2 - IEICE TRANSACTIONS on Electronics
SP - 207
EP - 210
AU - Tomomi YOSHIMOTO
AU - Tatsuo IWATA
PY - 2019
DO - 10.1587/transele.2018ECS6016
JO - IEICE TRANSACTIONS on Electronics
SN - 1745-1353
VL - E102-C
IS - 2
JA - IEICE TRANSACTIONS on Electronics
Y1 - February 2019
AB - Finely textured structures on a silicon surface were fabricated to act as field emitters via simple sandblasting using fine Al2O3 particles. Tests confirmed that the finely nicked structures function well as efficient field emitters. The emission current obeys the Fowler-Nordheim relationship, with a low electric field threshold. The fluctuation of the emission current was inversely proportional to the square root of the average emission current, and the long-term drift of the emission current was about 1% per hour at the average emission current of 108µA in the pressure range of 10-5Pa, indicating that the emitter offers a stable current output.
ER -