The original paper is in English. Non-English content has been machine-translated and may contain typographical errors or mistranslations. ex. Some numerals are expressed as "XNUMX".
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The original paper is in English. Non-English content has been machine-translated and may contain typographical errors or mistranslations. Copyrights notice
Um novo sensor de deslocamento foi proposto baseado em um modulador delta-sigma de frequência (FDSM) empregando um oscilador de microondas. Para demonstrar a operação básica, fabricamos um perfilador de superfície da ponta usando um ressonador de cavidade cilíndrica, onde uma extremidade da cavidade é substituída por um diafragma de metal fino com uma ponta de sonda da ponta. Um bom perfil de superfície foi obtido com sucesso com este dispositivo. Uma trincheira de profundidade de 10 nm foi claramente observada juntamente com uma trincheira de 10 µm trincheira em uma única varredura sem controle de ganho. Este resultado demonstra claramente uma faixa dinâmica extremamente ampla dos sensores de deslocamento FDSM.
Koichi MAEZAWA
University of Toyama
Umer FAROOQ
University of Toyama
Masayuki MORI
University of Toyama
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Koichi MAEZAWA, Umer FAROOQ, Masayuki MORI, "A Novel Displacement Sensor Based on a Frequency Delta-Sigma Modulator and its Application to a Stylus Surface Profiler" in IEICE TRANSACTIONS on Electronics,
vol. E106-C, no. 9, pp. 486-490, September 2023, doi: 10.1587/transele.2022ECS6013.
Abstract: A novel displacement sensor was proposed based on a frequency delta-sigma modulator (FDSM) employing a microwave oscillator. To demonstrate basic operation, we fabricated a stylus surface profiler using a cylindrical cavity resonator, where one end of the cavity is replaced by a thin metal diaphragm with a stylus probe tip. Good surface profile was successfully obtained with this device. A 10 nm depth trench was clearly observed together with a 10 µm trench in a single scan without gain control. This result clearly demonstrates an extremely wide dynamic range of the FDSM displacement sensors.
URL: https://global.ieice.org/en_transactions/electronics/10.1587/transele.2022ECS6013/_p
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@ARTICLE{e106-c_9_486,
author={Koichi MAEZAWA, Umer FAROOQ, Masayuki MORI, },
journal={IEICE TRANSACTIONS on Electronics},
title={A Novel Displacement Sensor Based on a Frequency Delta-Sigma Modulator and its Application to a Stylus Surface Profiler},
year={2023},
volume={E106-C},
number={9},
pages={486-490},
abstract={A novel displacement sensor was proposed based on a frequency delta-sigma modulator (FDSM) employing a microwave oscillator. To demonstrate basic operation, we fabricated a stylus surface profiler using a cylindrical cavity resonator, where one end of the cavity is replaced by a thin metal diaphragm with a stylus probe tip. Good surface profile was successfully obtained with this device. A 10 nm depth trench was clearly observed together with a 10 µm trench in a single scan without gain control. This result clearly demonstrates an extremely wide dynamic range of the FDSM displacement sensors.},
keywords={},
doi={10.1587/transele.2022ECS6013},
ISSN={1745-1353},
month={September},}
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TY - JOUR
TI - A Novel Displacement Sensor Based on a Frequency Delta-Sigma Modulator and its Application to a Stylus Surface Profiler
T2 - IEICE TRANSACTIONS on Electronics
SP - 486
EP - 490
AU - Koichi MAEZAWA
AU - Umer FAROOQ
AU - Masayuki MORI
PY - 2023
DO - 10.1587/transele.2022ECS6013
JO - IEICE TRANSACTIONS on Electronics
SN - 1745-1353
VL - E106-C
IS - 9
JA - IEICE TRANSACTIONS on Electronics
Y1 - September 2023
AB - A novel displacement sensor was proposed based on a frequency delta-sigma modulator (FDSM) employing a microwave oscillator. To demonstrate basic operation, we fabricated a stylus surface profiler using a cylindrical cavity resonator, where one end of the cavity is replaced by a thin metal diaphragm with a stylus probe tip. Good surface profile was successfully obtained with this device. A 10 nm depth trench was clearly observed together with a 10 µm trench in a single scan without gain control. This result clearly demonstrates an extremely wide dynamic range of the FDSM displacement sensors.
ER -